Angstrom Engineering 6-pocket E-Beam Evaporator

• The Angstrom E-beam is for thin-film evaporation in the range of 5 nm to several microns thick.

• A maximum of six different materials can be evaporated in one pump-down cycle, from the six pockets electron gun.

• The thickness of the metal is monitored in-situ by a thickness monitor.

o Substrates up to 6 inch diameter can be attached to the substrate holder.

• The sample temperature usually does not exceed 50 °C.

• The following materials are available: Au, Pd, Ge, Ni, Pt, Cu, and Ti.

This instrument is housed in IATL 174 is managed by Schaffer Finney.

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