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MATFab Facility

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  • About
  • Using the Lab
    • Gaining Access to the Facility
    • What does it cost?
    • Instruments in Depth
      • Atomic Layer Deposition
      • BET
      • Combustion Elemental Analyzer
      • Electron Beam Deposition
      • Electron Microprobe
      • Ellipsometer
      • ICP MS
      • ICP OES
      • ICP Reactive Ion Etcher
      • Nanonex -NX-1000 NanoImprint
      • OAI Mask Aligner
      • Raman Microscope
      • Raith E-Beam Lithography
      • Reactive Ion Etcher
      • Scanning Electron Microscope
      • Sputterer
      • XPS
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  1. Home
  2. Using the Lab
  3. Instruments in Depth

Instruments in Depth

Main navigation

  • Atomic Layer Deposition
  • BET
  • Combustion Elemental Analyzer
  • Electron Beam Deposition
  • Electron Microprobe
  • Ellipsometer
  • ICP MS
  • ICP OES
  • ICP Reactive Ion Etcher
  • Nanonex -NX-1000 NanoImprint
  • OAI Mask Aligner
  • Raman Microscope
  • Raith E-Beam Lithography
  • Reactive Ion Etcher
  • Scanning Electron Microscope
  • Sputterer
  • XPS

Please click on the link below or on the side of the page to get additional details on the specifics and capabilities of each instrument.

To schedule equipment, visit the Bookit Labs online reservation system.

Characterization

  • X-ray Photoelectron Spectroscopy
  • Electron Microprobe
  • Scanning Electron Microscope
  • ICP-MS
  • ICP-OES
  • Raman spectroscopy
  • Combustion Elemental Analyzer (CHN) 
  • Brunauer-Emmett-Teller (BET) analysis
  • Spectroscopic Ellipsometer
  • WYKO NT1100 3-D Profiling System
  • Leica GZ Stereo Microscope

Lithography and NanoImprint

  • Electron Beam Nanolithography System
  • Nanonex NX1000 NanoImprint
  • OAI Mask Aligner Model 800

Thin-film deposition

  • Angstrom Engineering 6-pocket E-Beam Evaporator
  • IntlVac - Nanochrom I Sputterer
  • Oxford Instruments - Atomic Layer Deposition (ALD) System - OpAL
  • Nanonex_Ultra

Plasma etching

  • Oxford Instruments - RIE-ICP PlasmaPro 100 Cobra
  • Oxford Instruments RIE NGP80

Sample Preparation

  • VWR Vacuum Oven
The University of Iowa
University of Iowa 175th Anniversary

MATFab Facility


Iowa Advanced Technology Laboratories
(IATL), Rooms 170, 172, 174, and 198

205 N. Madison Street
Iowa City, IA  52242

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