Please click on the link below or on the side of the page to get additional details on the specifics and capabilities of each instrument.

To schedule equipment, visit the Bookit Labs online reservation system.

Characterization

• X-ray Photoelectron Spectroscopy
• Electron Microprobe
• Scanning Electron Microscope
• ICP-MS
• ICP-OES
• Raman spectroscopy
• Combustion Elemental Analyzer (CHN) 
• Brunauer-Emmett-Teller (BET) analysis
• Spectroscopic Ellipsometer
• WYKO NT1100 3-D Profiling System
• Leica GZ Stereo Microscope

Lithography and NanoImprint

• Electron Beam Nanolithography System
• Nanonex NX1000 NanoImprint
• OAI Mask Aligner Model 800

Thin-film deposition

• Angstrom Engineering 6-pocket E-Beam Evaporator
• IntlVac - Nanochrom I Sputterer
• Oxford Instruments - Atomic Layer Deposition (ALD) System - OpAL
• Nanonex_Ultra

Plasma etching

• Oxford Instruments - RIE-ICP PlasmaPro 100 Cobra
• Oxford Instruments RIE NGP80

Sample Preparation

• VWR Vacuum Oven