To schedule equipment, visit the Bookit Labs online reservation system.

Characterization

• X-ray Photoelectron Spectroscopy
• Electron Microprobe
• Scanning Electron Microscope
• ICP-MS
• ICP-OES
• RAMAN- Currently down
• Combustion Elemental Analyzer (CHN) 
• Leica GZ Stereo Microscope
• Spectroscopic Ellipsometer
• WYKO NT1100 3-D Profiling System

Lithography and NanoImprint

• Electron Beam Nanolithography System
• Nanonex NX1000 NanoImprint
• OAI Mask Aligner Model 800

Thin-film deposition

• Angstrom Engineering 6-pocket E-Beam Evaporator
• IntlVac - Nanochrom I Sputterer
• Oxford Instruments - Atomic Layer Deposition (ALD) System - OpAL
• Nanonex_Ultra

Plasma etching

• Oxford Instruments - RIE-ICP PlasmaPro 100 Cobra
• Oxford Instruments RIE NGP80

Sample Preparation

• VWR Vacuum Oven