• Imprint of features size down to 6 nm demonstrated

• Full-wafer nanoimprinting tool for thermoplastic and thermal curable resists

• Patented Air Cushion PressTM (ACP) for ultimate nanoimprint uniformity

• High throughput due to full-wafer imprinting and minimized thermal mass

• Smart Sample Holder for handling different sizes and irregular shapes

This instrument is housed in IATL 174 and is managed by Schaffer Finney.

Reserve equipment on BookIt