IntlVac - Nanochrome I Sputterer
• Precision optical coatings of metals and dielectrics – Si, SiO2, Si3N4 SiOxyNitride
• High vacuum capabilities: able to achieve ultimate pressures of approximately 5 x 10-8 Torr
• Ability to fit up to three 4’’ sputtering cathodes with indirect cooling
• R.F., A.C. and D.C. Planar Magnetron Sputerring Applications
• Automated system control with a touch-screen interface
This instrument is located in IATL 174 and is managed by Schaffer Finney.