Users can be trained to run their own samples on the instruments in the facility. We charge $35/hr for the initial user training and then the hourly rate listed in the table is used for billing. If you would like to have staff run your samples, then there is also a staff labor charge of $70/hr on top of the rate listed in the table. Please contact us if you have questions (matfab-staff@uiowa.edu) regarding our rates or would like to be trained on any of the instruments and services that we provide in the facility.
Instrument | Service |
Cost Academic Researchers |
Cost External Industry |
Angstrom Electron Beam Evaporator | Electron beam Metal Evaporator | $55/hr | $137.5/hr |
Intilvac Nanochrome Sputtering System | Sputterer | $55/hr | $137.5/hr |
Oxford OPAL ALD | Atomic Layer Deposition | $55/hr | $137.5/hr |
OAI 800 Mask Aligner | UV Lithography | $55/hr | $137.5/hr |
Oxford RIE NGP80 | Reactive Ion Etcher | $55/hr | $137.5/hr |
Oxford Plasma Pro 100 Cobra | Intercoupled Plasma Reactive Ion Etcher | $55/hr | $137.5/hr |
Nanonex 1006 | Nanoimprinter | $55/hr | $137.5/hr |
Raith Voyager | E-beam Lithography | $70/hr | $175/hr |
Raith Voyager | SEM Imaging | $35/hr | $87.5/hr |
MTI RTP Annealer | RTP Tube Furnace | $33/hr | $82.5/hr |
Edwards Thermal Evaporator | Thermal Evaporator for Thin Films | $33/hr | $82.5/hr |
MTI Wafer Dicer | Computer Controlled Wafer Dicer | $33/hr | $82.5/hr |
Mechanical Polisher | Mechanical Polisher (1um tolerance) | $33/hr | $82.5/hr |
Veeco Optical Profiler | Optical Profiler | $33/hr | $82.5/hr |
Woollam Ellipsometer | Ellipsometer | $33/hr | $82.5/hr |
Custom Tube Furnace | Tube Furnace | $33/hr | $82.5/hr |
WVWR Vacuum Oven | Vacuum Oven | $33/hr | $82.5/hr |
Negative Resist Spinner | Resist Spinner | $55/hr | $137.5/hr |
Positive Resist Spinner | Resist Spinner | $55/hr | $137.5/hr |
170 Wet Bench | Wet Bench | $20/hr | $50/hr |
174 Wet Bench | Wet Bench | $20/hr | $50/hr |
Nikon Eclipse Ci Pol Microscope | Microscope | $5/hr | $12.5/hr |
Quantichrome BET | Surface Area and Pore Space Analyzer | $20/sample | $50/sample |
Zeiss Microscope | Microscope | $33/hr | $82.5/hr |
Kratos Axis Ultra XPS | X-Ray photoelectron spectrometer | $55/hr | $137.5/hr |
Renishaw Raman microscope | Raman microscopy | $30/hr | $75/hr |
Varian ICP-OES | Inductively Coupled Plasma Optical Emission Spectrometer | $45/hr | $112.5/hr |
Exeter CE440 combustion analyzer | Elemental analysis for CHN | $80/hr | $200/hr |
Agilent ICP-MS | Stable Isotope Mass Spectrometer for liquids | $40/hr | $100/hr |
ICP-MS with laser ablation | Mass Spectrometry with laser ablation for solids | $50/hr | $125/hr |
JEOL Microprobe | Electron Probe microanalyzer | $70/hr | $175/hr |
Hitachi SEM | Microscopy | $25/hr | $62.5/hr |
Rigaku XRF | X-Ray Fluorescence Spectrometer | $90/hr | $225/hr |