Users can be trained to run their own samples on the instruments in the facility.  We charge $35/hr for the initial user training and then the hourly rate listed in the table is used for billing.  If you would like to have staff run your samples, then there is also a staff labor charge of $70/hr on top of the rate listed in the table.  Please contact us if you have questions ( regarding our rates or would like to be trained on any of the instruments and services that we provide in the facility.

Instrument Service


Academic Researchers


External Industry

Billing Notes
Clean Room Access to Clean Room $27/hr $54/hr Charged when user reserves an instrument in the cleanroom facilities
Angstrom Electron Beam Evaporator Electron beam Metal Evaporator $55/hr $137.5/hr Billing is by reservation.
Intilvac Nanochrome Sputtering System Sputterer $55/hr $137.5/hr Billing is by reservation.
Oxford OPAL ALD Atomic  Layer Deposition $55/hr $137.5/hr Billing is by reservation.
OAI 800 Mask Aligner UV Lithography $55/hr $137.5/hr Billing is by reservation.
Oxford RIE NGP80 Reactive Ion Etcher $55/hr $137.5/hr Billing is by reservation.
Oxford Plasma Pro 100 Cobra Intercoupled Plasma Reactive Ion Etcher $55/hr $137.5/hr Billing is by reservation.
Nanonex 1006 Nanoimprinter $55/hr $137.5/hr Billing is by reservation.
Raith Voyager  E-beam Lithography $70/hr $175/hr Billing is by reservation.
MTI RTP Annealer RTP Tube Furnace $33/hr $82.5/hr Billing is by reservation.
Edwards Thermal Evaporator Thermal Evaporator for Thin Films $33/hr $82.5/hr Billing is by reservation.
MTI Wafer Dicer Computer Controlled Wafer Dicer $33/hr $82.5/hr Billing is by reservation.
Mechanical Polisher Mechanical Polisher (1um tolerance) $33/hr $82.5/hr Billing is by reservation.
Veeco Optical Profiler Optical Profiler $33/hr $82.5/hr Billing is by reservation.
Woollam Ellipsometer Ellipsometer $33/hr $82.5/hr Billing is by reservation.
Custom Tube Furnace Tube Furnace $33/hr $82.5/hr Billing is by reservation.
WVWR Vacuum Oven Vacuum Oven $33/hr $82.5/hr Billing is by reservation.
Spin Coater Resist Spinner $55/hr $137.5/hr Billing is by reservation.
170 Chemical Fume Hood Chemical Fume hood for acid and base etching $20/hr $50/hr Must reserve bench on Bookit before use and be fully trained by MATFab staff.  See laboratory manual for more details.
174 Laminar Flow Hood Laminar Flow Hood for spin coating and organic solvents $20/hr $50/hr Must reserve bench on Bookit before use and be fully trained by MATFab staff.  See laboratory manual for more details.
Chemical Storage and Waste Disposal Monthly charge for chemical storage and waste disposal $70/month Contact us for details Additional fee of $165 will be charged for improper storage or waste.
Nikon Eclipse Ci Pol Microscope Microscope $5/hr $12.5/hr Billing is by reservation.
Quantichrome BET Surface Area and Pore Space Analyzer  $20/sample $50/sample Reserve degassing port separately from analysis ports on Bookit; glassware available for $35/unit 
Renishaw Raman microscope Raman microscopy $30/hr $75/hr Instrument should be warmed up for 30 min prior to use but user is not charged for that time if reserved 24 hrs in advance.  Can contact Dr. Daniel Unruh for assistance on warm-up.  Instrument billing as usage.  Typical data collection time = 10 min/sample 
Varian ICP-OES Inductively Coupled Plasma Optical Emission Spectrometer $45/hr $112.5/hr Billing through usage.
Exeter CE440 combustion analyzer  Elemental analysis for CHN  $25 set-up charge + $5/sample  $50 set-up charge + $10/sample  Instrument must be reserved on BookIt.  Set-up charge includes consumables (He gas, Sn sleeve, Ni sleeve, column materials, conditioners, and standards) 
Agilent ICP-MS Stable Isotope Mass Spectrometer for liquids $50/hr $125/hr Billing through usage.
ICP-MS with laser ablation Mass Spectrometry with laser ablation for solids $50/hr $125/hr Billing through usage.
HR-ICP-MS High resolution Mass Spectrometry $90/hr $225/hr Billing through usage.  
JEOL Microprobe Electron Probe microanalyzer


$600/24 hrs


$1,500/24 hr

Billing through usage.
Hitachi SEM Microscopy  $25/hr $62.5/hr Billing through usage.
Rigaku XRF X-Ray Fluorescence Spectrometer  $90/hr $225/hr

Billing through usage.   

EZ Scan for qualitative analysis = 10 min/sample; Quantitative analysis  = 20 min/sample

D8 Advance Powder X-ray diffraction $15/hr $37.5/hr Billing through usage. Typical powder scan = 20 min/sample 
D8 Venture Duo Single Crystal X-ray Diffraction



Billing through usage.   

Crystal quality scanning = 20-60 min/sample                      

Typical data collection = 2-6 hrs/sample 

SkyScan Micro CT Micro Computed Tomography $70/hr $70/hr Billing through usage.  Samples less than 10 mm in diameter are ideal. Run times vary depending on density from minutes to hours.

Notes:  Billing takes place through the BookItLab software.  Billing through reservation means you will be charged for the time that you reserved on BookItLab.  Billing through usage means that billing does not start until you log into the instrument and ends when you log out.  With billing through usage, you will continue to be charged if you forget to log out.  Off-site log out is available on the BookitLab page so that you do not have to be physically in the lab to log off of an instrument.