IntlVac - Nanochrome I Sputterer

• Precision optical coatings of metals and dielectrics – Si, SiO2, Si3N4 SiOxyNitride

• High vacuum capabilities: able to achieve ultimate pressures of approximately 5 x 10-8 Torr

• Ability to fit up to three 4’’ sputtering cathodes with indirect cooling

• R.F., A.C. and D.C. Planar Magnetron Sputerring Applications

• Automated system control with a touch-screen interface

This instrument is located in IATL 174 and is managed by Schaffer Finney.

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